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DLS-LHOP2024071101
C-Laser
General Introduction:
Corning 7980, ArF Grade, is a high purity synthetic amorphous silicon dioxide manufactured by flame hydrolysis. The noncrystalline, colorless, silica glass combines a very low thermal expansion coefficient with excellent optical qualities and exceptional transmittance in the deep ultraviolet. ArF Grade was developed for 193 nm lithography systems.
In order to satisfy the challenging quality requirements of our customers in leading edge applications such as microlithography, Corning is dedicated to continuous improvement. Our investments in research and develop- ment, combined with Corning's quality systems, support our technology leadership position and ensure that we meet our customer's requirements on time, every time.
Corning Ultra pure fused silica glass material HPFS 7980
Materials were first developed by Corning for US aerospace equipment, and then gradually used in commercial field. Corning has made a comparison between Schott's and Russia's corresponding materials. Corning's products have obvious advantages in uniformity and consistency. The most important thing is that Corning's products have very small and stable material stress in the case of similar optical and mechanical properties.
Products Name: Corning 7980 Fused Silica ArF Grade
Alias: HPFS Fused Silica ArF Grade 7980,Corning 7980, Corning 7980 fused silica, Corning 7980 fused silica ArF Grade, HPFS Corning 7980 fused silica, Corning 7980 semiconductor optics materials, etc
Optical and Thermal Properties:
Softening Point | 1585 ºC (107.6 poises) |
Annealing Point | 1042 ºC (1013 poises) |
Strain Point | 893 ºC (1014.5 poises) |
Thermal Conductivity | 1.30 W/m K |
Thermal Diffusivity | 0.0075 cm2/s |
Average C.T.E. | 0.52 ppm/K 5 ºC-35 ºC 0.57 ppm/K 0 ºC-200 ºC 0.48 ppm/K -100 ºC-200 ºC |
Mechanical Properties:
Elastic (Young's) Modulus | 72.7 GPa |
Shear Modulus | 31.4 GPa |
Average Modulus of Rupture, abraded | 52.4 MPa |
Bulk Modulus | 35.4 GPa |
Poisson's Ratio | 0.16 |
Density | 2.201 g/cm3 |
Knoop Hardness (100 g load) | 522 kg/mm2 |
Chemical Durability:
Solution | Time | Weight Loss [mg/cm2] | |
5% HCL by weight | @95 ºC | 24 h | < 0.010 |
5% NaOH | @95 ºC | 6 h | 0.453 |
0.02N NA2CO3 | @95 ºC | 6 h | 0.065 |
0.02N H2SO4 | @95 ºC | 24 h | < 0.010 |
Deionized H2O | @95 ºC | 24 h | 0.015 |
10% HF by weight | @25 ºC | 20 m | 0.230 |
10% NH4F*HF by weight | @25 ºC | 20 m | 0.220 |
Main Applying Fields:
Applying Fields: | Application of microlithography Lithography lens, Photomask substrate Deep ultraviolet laser element Optical standard parts Excimer laser optics Lithographic optics Beam transmission element Light guide Laser fusion Application of various aerospace technologies |
***** | other |
Matching Custom Manufacturing Serivce:
Including Moulding, CNC machining, Polishing, Particle beam processing, Magnetic flux conversion processing, Grinding, Coating, Lightweighting, Custom Shaping, Counterbores, Drilling & Coring, Edge & Bevel Polishing,3D Contouring, Bevels & Chamfers, Steps & Slots, Laser Cutting & Marking, Metrology & Inspection, Precision Pitch Polishing, Double-Sided Polishing, Optical Assembly, Measuring, etc.
Matching processing equipments;
1).Single side lapping and polishing machines
2).Duble sided polishing machines
3).Ring throwing machines
4).DMG five-axis five-linkage spherical milling machine
5).DMG ultrasonic machining center
6).Super large scale gantry cnc machining center (2.0*2.0m)
7).Super large scale surface grinder (1.6m*1.6m)
8).CNC cutting machines
9).Thin plate cleaning machines
10).Ultrasonic trough cleaning machines
11).Plane interferometers
12).Two dimensional detectors
13).Ion beam polishing machines
14).Magnetorheological polishing equipments
General Introduction:
Corning 7980, ArF Grade, is a high purity synthetic amorphous silicon dioxide manufactured by flame hydrolysis. The noncrystalline, colorless, silica glass combines a very low thermal expansion coefficient with excellent optical qualities and exceptional transmittance in the deep ultraviolet. ArF Grade was developed for 193 nm lithography systems.
In order to satisfy the challenging quality requirements of our customers in leading edge applications such as microlithography, Corning is dedicated to continuous improvement. Our investments in research and develop- ment, combined with Corning's quality systems, support our technology leadership position and ensure that we meet our customer's requirements on time, every time.
Corning Ultra pure fused silica glass material HPFS 7980
Materials were first developed by Corning for US aerospace equipment, and then gradually used in commercial field. Corning has made a comparison between Schott's and Russia's corresponding materials. Corning's products have obvious advantages in uniformity and consistency. The most important thing is that Corning's products have very small and stable material stress in the case of similar optical and mechanical properties.
Products Name: Corning 7980 Fused Silica ArF Grade
Alias: HPFS Fused Silica ArF Grade 7980,Corning 7980, Corning 7980 fused silica, Corning 7980 fused silica ArF Grade, HPFS Corning 7980 fused silica, Corning 7980 semiconductor optics materials, etc
Optical and Thermal Properties:
Softening Point | 1585 ºC (107.6 poises) |
Annealing Point | 1042 ºC (1013 poises) |
Strain Point | 893 ºC (1014.5 poises) |
Thermal Conductivity | 1.30 W/m K |
Thermal Diffusivity | 0.0075 cm2/s |
Average C.T.E. | 0.52 ppm/K 5 ºC-35 ºC 0.57 ppm/K 0 ºC-200 ºC 0.48 ppm/K -100 ºC-200 ºC |
Mechanical Properties:
Elastic (Young's) Modulus | 72.7 GPa |
Shear Modulus | 31.4 GPa |
Average Modulus of Rupture, abraded | 52.4 MPa |
Bulk Modulus | 35.4 GPa |
Poisson's Ratio | 0.16 |
Density | 2.201 g/cm3 |
Knoop Hardness (100 g load) | 522 kg/mm2 |
Chemical Durability:
Solution | Time | Weight Loss [mg/cm2] | |
5% HCL by weight | @95 ºC | 24 h | < 0.010 |
5% NaOH | @95 ºC | 6 h | 0.453 |
0.02N NA2CO3 | @95 ºC | 6 h | 0.065 |
0.02N H2SO4 | @95 ºC | 24 h | < 0.010 |
Deionized H2O | @95 ºC | 24 h | 0.015 |
10% HF by weight | @25 ºC | 20 m | 0.230 |
10% NH4F*HF by weight | @25 ºC | 20 m | 0.220 |
Main Applying Fields:
Applying Fields: | Application of microlithography Lithography lens, Photomask substrate Deep ultraviolet laser element Optical standard parts Excimer laser optics Lithographic optics Beam transmission element Light guide Laser fusion Application of various aerospace technologies |
***** | other |
Matching Custom Manufacturing Serivce:
Including Moulding, CNC machining, Polishing, Particle beam processing, Magnetic flux conversion processing, Grinding, Coating, Lightweighting, Custom Shaping, Counterbores, Drilling & Coring, Edge & Bevel Polishing,3D Contouring, Bevels & Chamfers, Steps & Slots, Laser Cutting & Marking, Metrology & Inspection, Precision Pitch Polishing, Double-Sided Polishing, Optical Assembly, Measuring, etc.
Matching processing equipments;
1).Single side lapping and polishing machines
2).Duble sided polishing machines
3).Ring throwing machines
4).DMG five-axis five-linkage spherical milling machine
5).DMG ultrasonic machining center
6).Super large scale gantry cnc machining center (2.0*2.0m)
7).Super large scale surface grinder (1.6m*1.6m)
8).CNC cutting machines
9).Thin plate cleaning machines
10).Ultrasonic trough cleaning machines
11).Plane interferometers
12).Two dimensional detectors
13).Ion beam polishing machines
14).Magnetorheological polishing equipments