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AGC AQ/AQ2/AQ3/AQR/AQT
AGC
CLASER-XS003
Application:
1.Lens for semiconductor exposure
2.Liquid crystal exposure lens
3.Optical mask base plate
4.Optical components
5.Glass chips
1.High transmittance *1 for a wide range of wavelengths such as deep ultraviolet and infrared light below 200nm, from i line to KrF, ArF and Xe long-axis lamps
2.Low compact rare characteristics, low birefringence
3.High heat resistance of about 1000℃
4.Excellent durability against high energy lasers
5.Low thermal expansion rate below 1/10 of ordinary glass
6.High homogeneity, ultra-high purity, very low metal impurity content
7.Low OH group content
8.High resistance chemical
9.Low dielectric loss
Application:
1.Lens for semiconductor exposure
2.Liquid crystal exposure lens
3.Optical mask base plate
4.Optical components
5.Glass chips
1.High transmittance *1 for a wide range of wavelengths such as deep ultraviolet and infrared light below 200nm, from i line to KrF, ArF and Xe long-axis lamps
2.Low compact rare characteristics, low birefringence
3.High heat resistance of about 1000℃
4.Excellent durability against high energy lasers
5.Low thermal expansion rate below 1/10 of ordinary glass
6.High homogeneity, ultra-high purity, very low metal impurity content
7.Low OH group content
8.High resistance chemical
9.Low dielectric loss
